| 1. | Micromanipulation is an important emergency technology developed mainly over the past decade . the micro / nano manipulation systems have been widely applied to mems manufacturing , optical parts alignment , optical fiber connection , laser navigation , biomedical engineering and ic manufacturing 在过去的十年中,微操作技术得到了飞速的发展,微操作系统在mems制造、光学调整、光纤作业、激光制导、生物医疗、 ic制造等领域得到了广泛的应用。 |